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    Title :

    Laser transmission bonding of silicon to silicon with metallic interlayers for wafer-level packaging


    Contributors:
    Wissinger, A. (author) / Olowinsky, A. (author) / Gillner, A. (author) / Poprawe, R. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 5 ; 669-673


    Publication date :

    2013-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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