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    Title :

    Fabrication of curved sub-micron Si structures by a combination of anisotropic etching using surfactant-added TMAH solution and FIB direct-drawn mask


    Contributors:
    Tanaka, H. (author) / Hida, H. (author) / Sato, K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 7 ; 1065-1067


    Publication date :

    2013-01-01


    Size :

    3 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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