Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    A MEMS sandwich differential capacitive silicon-on-insulator accelerometer


    Contributors:
    Zhang, Y. (author) / Yang, G. (author) / Gao, C. (author) / Hao, Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 8 ; 1249-1254


    Publication date :

    2013-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    An All-Silicon Comb-Tooth Capacitive MEMS Accelerometer

    Niu, Haobin / Sun, Guoliang / Wang, Shuaimin et al. | Springer Verlag | 2022


    Optimization of MEMS capacitive accelerometer

    Benmessaoud, M. / Nasreddine, M. M. | British Library Online Contents | 2013


    Capacitive silicon MEMS based combined accelerometer and gyroscope sensors in headlight levelling systems

    Malinen, Niilo / Vilenius, Tommi / Collin, Jussi et al. | DataCite | 2023

    Free access

    Testing of MEMS capacitive accelerometer structure through electro-static actuation

    Kar, S. K. / Swamy, K. B. / Mukherjee, B. et al. | British Library Online Contents | 2013


    Design of an SOI-MEMS high resolution capacitive type single axis accelerometer

    Mistry, K. K. / Swamy, K. B. / Sen, S. | British Library Online Contents | 2010