Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    CVD diamond IR optics enable EUV lithography


    Contributors:
    Bennett, A. (author) / Anoikin, E. (author) / Vrolijk, B. (author)

    Published in:

    LASER FOCUS WORLD ; 49 , 11 ; 43


    Publication date :

    2013-01-01


    Size :

    43 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.366




    Magneto-optics enable waveguide-mode switch

    British Library Online Contents | 2001


    Fluorescent microspheres enable adaptive-optics microscopy

    Goode, B. | British Library Online Contents | 2009


    Nanoimprint lithography fabricates subwavelength optics

    Wang, J. / Kostal, H. | British Library Online Contents | 2005


    Lithography aids integration of optics

    Hairston, N. | British Library Online Contents | 2001