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    Title :

    Analysis and design for piezoresistive accelerometer geometry considering sensitivity, resonant frequency and cross-axis sensitivity


    Contributors:
    Liu, Y. (author) / Zhao, Y. (author) / Tian, B. (author) / Sun, L. (author) / Yu, Z. (author) / Jiang, Z. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 3 ; 463-470


    Publication date :

    2014-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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