Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Application of Preshaping Control to a Semiconductor Wafer Transfer Robot and Experimental Verification


    Contributors:
    Yamashita, T. (author) / Aribwo, W. (author) / Uchiyama, N. (author) / Terashima, K. (author) / Masui, Y. (author) / Saeki, T. (author)


    Publication date :

    2014-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    629.8





    Input preshaping with frequency domain information for flexible-linkmanipulator control

    TZES, ANTHONY / ENGLEHART, MATTHEW / YURKOVICH, STEPHEN | AIAA | 1989


    Preshaping Profiler for Flexible Spacecraft Rest-to-Rest Maneuvers

    Kamiya, Toshio / Maeda, Ken / Ogura, Naoto et al. | AIAA | 2006


    AIAA-2006-6181 Preshaping Profiler for Flexible Spacecraft Rest-to-Rest Maneuvers

    Kamiya, T. / Maeda, K. / Ogura, N. et al. | British Library Conference Proceedings | 2006