Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Fabrication and characterization of machined 3D diffractive optical elements


    Contributors:
    Kühne, S. (author) / Haskic, K. (author) / Lemke, S. (author) / Schmidt, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 2103-2107


    Publication date :

    2014-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Fabrication of diffractive optical elements using the CMOS process [4078-95]

    Chen, H. / Huang, H. / Yen, K. et al. | British Library Conference Proceedings | 2000


    Photomask fabrication of focusing diffractive optical elements using electron-beam lithography

    Babin, S. V. / Danilov, V. A. / SPIE | British Library Conference Proceedings | 1995




    Fabrication of diffractive optical elements by direct laser writing with circular scanning

    Koronkevich, V. P. / Kiryanov, V. P. / Korol'kov, V. P. et al. | British Library Conference Proceedings | 1994