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    Title :

    Design of experiments based factorial design and response surface methodology for MEMS optimization


    Contributors:
    Saleem, M. M. (author) / Somá, A. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 21 , 1 ; 263-276


    Publication date :

    2015-01-01


    Size :

    14 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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