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    Title :

    Interferometric metrology : 20-21 August 1987, San Diego, California



    Conference:

    International Technical Symposium on Optical & Optoelectronic Applied Science & Engineering ; 31st International Technical Symposium on Optical & Optoelectronic Applied Science & Engineering ; 31st (San Diego, Calif.)



    Publication date :

    1988


    Size :

    vi, 239 p


    Remarks:

    28 cm
    ill
    Conference 816, Interferometric metrology, was part of a four-conference program on Precision Instrument Design held at SPIE's 31st annual International Technical Symposium on Optical & Optoelectronic Applied Science & Engineering"--P. v
    Includes bibliographies
    Digital preservation by Technische Informationsbibliothek (TIB) / Leibniz-Informationszentrum Technik und Naturwissenschaften und Universitätsbibliothek



    Type of media :

    Conference Proceedings


    Type of material :

    Print


    Language :

    English



    Classification :

    DDC:    621.36/75




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