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    Title :

    THE VARIOUS MEMS METHODS TO BUILD TFTC SENSORS FOR RELATED AERO-/ASTRO- APPLICATIONS


    Contributors:
    Duan, Franklin L. (author) / Liu, Siging (author) / Xie, Ziyi (author) / Ji, Zhonglin (author) / Weng, Haotian (author) / Hu, Mingkai (author) / Gao, Junchao (author)

    Conference:

    AIAA SciTech Forum and Exposition ; 2021 ; Online


    Published in:

    Publication date :

    2021


    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English



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