Homogeneous Silica Formed by the Oxidation of Si(100) in Hyperthermal Atomic Oxygen
Maja Kisa, Long Li, Judith Yang, Timothy Minton, William Stratton, Paul Voyles, Xidong Chen, Klaus van Benthem, Steve Pennycook
Journal of Spacecraft and Rockets ; 43 , 2 ; 431-435
2006
Article (Journal)
Electronic Resource
English
Hyperthermal-Atomic-Oxygen Generator
NTRS | 1993
|Generating Hyperthermal Atomic Oxygen
NTRS | 1988
|British Library Conference Proceedings | 2005
|Oxidation of silicon (001) surfaces by hyperthermal atomic oxygen beam at room temperature
British Library Online Contents | 1997
|