Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Micromachining techniques for silicon carbide MEMS


    Contributors:

    Conference:

    Space Technology Conference and Exposition ; 1999 ; Albuquerque , NM , U.S.A.



    Publication date :

    1999-01-01



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




    Fibre-optical MEMS switches based on bulk silicon micromachining

    Hoffmann, M. / Kopka, P. / Nusse, D. et al. | British Library Online Contents | 2003


    Micromachining Of Silicon

    Dickman, John E. | NTRS | 1988


    A surface micromachining process for suspended RF-MEMS applications using porous silicon

    Ding, Y. / Liu, Z. / Liu, L. et al. | British Library Online Contents | 2003


    Micromachining of gallium nitride, sapphire, and silicon carbide with ultrashort pulses [5147-37]

    Rice, G. / Jones, D. / Kim, K. S. et al. | British Library Conference Proceedings | 2003