MEMS low cost inertial grade accelerometers and gyros using a common, bulk micromachining process
Guidance, Navigation, and Control Conference and Exhibit ; 1999 ; Portland , OR , U.S.A.
1999-01-01
Conference paper
Electronic Resource
English
MEMS Low Cost Inertial Grade Accelerometers and Gyros Using a Common, Bulk Micromachining Process
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