A fully monolithic, surface micromachined accelerometer - the technology, the features and test results
Ein vollstaendig monolithischer, feinstbearbeiteter Beschleunigungsmesser - Technologie, Eigenschaften und Testergebnisse.
1991
7 pages
ISATA-Proc.;911296;1991;24th ISATA, Proc.:Mechatronics - Use of Electronics for Product Design, Testing, Engineering...
Miscellaneous
English
Surface Micromachined Accelerometer: A Technology Update
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