Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    A fully monolithic, surface micromachined accelerometer - the technology, the features and test results


    Additional title:

    Ein vollstaendig monolithischer, feinstbearbeiteter Beschleunigungsmesser - Technologie, Eigenschaften und Testergebnisse.


    Contributors:

    Publication date :

    1991


    Size :

    7 pages


    Remarks:

    ISATA-Proc.;911296;1991;24th ISATA, Proc.:Mechatronics - Use of Electronics for Product Design, Testing, Engineering...


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



    Surface Micromachined Accelerometer: A Technology Update

    Dinsmore, Kristin A. / Payne, Richard S. | SAE Technical Papers | 1991


    Micromachined Tunneling Accelerometer

    Kenny, Thomas W. / Waltman, Stephen B. / Kaiser, William J. et al. | NTRS | 1993




    Micromachined Servo Accelerometer for Harsh Environments

    Connolly, Thomas F. | SAE Technical Papers | 2001