Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    Silicon microsystems


    Additional title:

    Silizium Mikrosysteme.



    Publication date :

    1993


    Size :

    14 pages


    Remarks:

    Isata-Proc.;93ME079;1993;26th ISATA, Proc.:Mechatronics


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



    93ME079 Silicon Microsystems

    Heuberger, A. / ISATA / ENEA; Agency: Italy | British Library Conference Proceedings | 1993



    Space Qualification of Direct Bonded Silicon Microsystems

    Kohler, J. / Jonsson, K. / Jonsson, M. et al. | British Library Conference Proceedings | 1999


    Silicon sensor microsystems for the European automotive market

    Jakobsen, H. / Ohlckers, P. | Tema Archive | 1996


    Integrated Microsystems

    Esashi, Masayoshi / Tanaka, Shuji | Tema Archive | 2012