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    Title :

    Surface micromachined angular rate sensor


    Additional title:

    Winkelgeschwindigkeitssensor mit mikrobearbeiteter Oberflaeche.



    Publication date :

    1995


    Size :

    7 pages


    Remarks:

    SAE-Paper;950538;1995;Sensors and Actuators 1995;SAE Spec.Publ.; SP-1066


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



    Surface Micromachined Angular Rate Sensor

    Sparks, Douglas R. / Johnson, Jack D. / Zarabadi, Seyed R. | SAE Technical Papers | 1995


    Surface Micromachined Angular Rate Sensor

    Johnson, J. D. / Zarabadi, S. R. / Sparks, D. R. et al. | British Library Conference Proceedings | 1995


    Surface micromachined angular rate sensor

    Johnson, J.D. / Zarabadi, S.R. / Sparks, D.R. | Tema Archive | 1996


    A CMOS integrated surface micromachined angular rate sensor for automotive applications

    Sparks,D.R. / Zaranadi,S.R. / Johnson,J.D. et al. | Automotive engineering | 1997


    A CMOS integrated surface micromachined angular rate sensor for automotive applications

    Sparks, D. R. / Zarabadi, S. R. / Johnson, J. D. et al. | British Library Conference Proceedings | 1997