Micromachined electromechanical sensors for automotive applications
Feinstbearbeitete elektromechanische Sensoren fuer kraftfahrzeugtechnische Anwendungen.
1998
5 pages
SAE-Paper;980270;1998;Sensors and Actuators 1998;SAE Spec.Publ.; SP-1312
Miscellaneous
English
Micromachined electromechanical sensors for automotive applications
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