The invention discloses a crown block device and a control method thereof.The crown block device comprises a crown block body, a side moving device and a grabbing device, the crown block body is provided with at least one buffer carrying platform, the side moving device is connected with the crown block body, the grabbing device is connected with the side moving device, and the buffer carrying platform is connected with the side moving device. The lateral moving device drives the grabbing device to move to the position above the cache carrying table. According to the invention, at least one cache carrying platform for storing the wafer box is additionally arranged on the crown block main body, the lateral moving device drives the grabbing device to move and place the wafer box on the cache carrying platform, and meanwhile, one box of wafer can be carried in the cavity through the grabbing device in the advancing process of the crown block, so that the crown block can carry multiple boxes of wafers at the same time in one trip; the carrying capacity of the crown block is greatly improved, and the productivity of a chip manufacturing factory is improved.
本发明公开了一种天车装置及其控制方法,其装置包括天车主体、侧移装置和抓取装置,所述天车主体上设有至少一个缓存载台,所述侧移装置与所述天车主体连接,所述抓取装置与侧移装置连接,所述侧移装置带动抓取装置移动至缓存载台上方。本发明在天车主体上增加至少一个存放晶圆盒的缓存载台,通过侧移装置带动抓取移动将晶圆盒移动放置在缓存载台上,同时天车行进过程中腹腔中还可以通过抓取装置运载一盒晶圆,由此天车单趟可以同时搬运多盒晶圆,大大提升了天车的运载能力,提高了芯片制造工厂的产能。
Crown block device and control method thereof
一种天车装置及其控制方法
2025-01-07
Patent
Electronic Resource
Chinese
IPC: | B66C Krane , CRANES |
Crown block detection device, detection method thereof and crown block carrying system
European Patent Office | 2024
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