The invention provides a conveying device capable of safely and efficiently conveying a cryopump. A conveyance device (10) is provided with: a carriage (12) having front wheels (26) and rear wheels (28); a mast (14) extending in the height direction from the front side of the carriage (12); a lifting part (16) supported by the mast (14) and having a variable height; a guide rail (18) that extends forward from the lifting unit (16); an arm part (20) supported by the guide rail (18) and capable of sliding in the front-back direction; a loading table (22) that is provided to the tip (46) of the arm (20) and holds the cryopump (70); and a counterweight (24) provided on the rear side of the carriage (12).

    本发明提供一种能够安全且高效地搬运低温泵的搬运装置。搬运装置(10)具备:台车(12),具有前轮(26)及后轮(28);桅杆(14),从台车(12)的前侧沿高度方向延伸;升降部(16),被桅杆(14)支承并且高度可变;导轨(18),从升降部(16)向前方延伸;臂部(20),被导轨(18)支承并且能够在前后方向上滑动;载货台(22),设置于臂部(20)的前端部(46)并且保持低温泵(70);及配重(24),设置于台车(12)的后侧。


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    Title :

    Conveying device and conveying method


    Additional title:

    搬运装置及搬运方法


    Contributors:

    Publication date :

    2025-04-18


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last



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