A wafer assembly (30) includes a substrate (71), in turn including a wafer (70) or a stack of wafers. The wafer assembly (30) further includes an electrical connection (32) arranged through at least a part of the substrate (71). The electrical connection (32) is made by low-resistance silicon. The electrical connection (32) is positioned in a hole (84) penetrating at least a part of the substrate (71). A surface (78) of the substrate (71) confining the hole (84) is electrically insulating. The electrical connection (32) has at least one protrusion (75), which protrudes transversally to a main extension (83) of the hole (84) and the protrusion (75) protrudes outside a minimum hole diameter (85), as projected in the main extension (83) of the hole (84). Preferably, the protrusion (75) is supported by a support surface (81) of the substrate (71). A manufacturing method is also disclosed.
NOZZLE ARRANGEMENT FOR USE IN A GAS THRUSTER, GAS THRUSTER, METHOD FOR MANUFACTURING A NOZZLE ARRANGEMENT, METHOD FOR IN-SITU REPAIRING OF A NOZZLE ARRANGEMENT AND A METHOD FOR OPERATING A GAS THRUSTER
DÜSENANORDNUNG ZUR VERWENDUNG IN EINER GASSCHUBVORRICHTUNG, GASSCHUBVORRICHTUNG, VERFAHREN ZUR HERSTELLUNG EINER DÜSENANORDNUNG, VERFAHREN ZUR IN-SITU-REPARATUR EINER DÜSENANORDNUNG UND VERFAHREN ZUM BETRIEB EINER GASSCHUBVORRICHTUNG
AGENCEMENT DE BUSE DESTINÉ À ÊTRE UTILISÉ DANS UN PROPULSEUR À GAZ, PROPULSEUR À GAZ, PROCÉDÉ DE FABRICATION D'UN AGENCEMENT DE BUSE, PROCÉDÉ DE RÉPARATION IN SITU D'UN AGENCEMENT DE BUSE ET PROCÉDÉ D'UTILISATION D'UN PROPULSEUR À GAZ
2016-04-06
Patent
Electronic Resource
English
IPC: | H05K PRINTED CIRCUITS , Gedruckte Schaltungen / B64G Raumfahrt , COSMONAUTICS / B81B Mikrostrukturbauelemente oder -systeme, z.B. mikromechanische Bauelemente , MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES / B82Y Bestimmter Gebrauch oder bestimmte Anwendung von Nanostrukturen , SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES / F02K JET-PROPULSION PLANTS , Strahltriebwerke / F03H PRODUCING A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR , Erzeugung von Vortriebskraft [Schub] nach dem Prinzip des Rückstoßes, soweit nicht anderweitig vorgesehen / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / H01R Elektrisch leitende Verbindungen , ELECTRICALLY-CONDUCTIVE CONNECTIONS |