[Object] To provide an electron source that is lightweight, simple in configuration, and capable of suppressing characteristic degradation or recovering characteristics without causing an increase in power consumption.[Solving Means] A CNT electron source includes: a CNT emitter 32 for emitting electrons; a gate electrode 33 for extracting electrons from the CNT emitter 32; and a gate power supply connection switching relay 37a and a CNT emitter grounding switching relay 37b that cause the gate electrode 33 to emit electrons to irradiate the CNT emitter with electrons.
ELECTRON SOURCE AND ELECTRON SOURCE UNIT
ELEKTRONENQUELLE UND ELEKTRONENQUELLENEINHEIT
SOURCE D'ÉLECTRONS ET UNITÉ DE SOURCE D'ÉLECTRONS
2022-11-16
Patent
Electronic Resource
English
Electron Bombardment Ion Source
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