A magnetic bearing vacuum pump comprises: a first displacement signal generation section configured to amplify, by a resolution multiplying factor K of K>1, a displacement modulated wave signal modulated according to a displacement of the rotor from a predetermined position to generate a high-resolution displacement signal in a first displacement region including the predetermined position; a second displacement signal generation section configured to generate a low-resolution displacement signal in a larger second displacement region including the first displacement region; a selection section configured to select either one of the high-resolution displacement signal or the low-resolution displacement signal based on an unsteady-state response signal obtained by excluding a steady-state whirling displacement component from the high-resolution displacement signal or the low-resolution displacement signal; and a bearing control section configured to control the magnetic bearing based on the displacement signal selected by the selection section.


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    Title :

    Magnetic levitation vacuum pump


    Contributors:

    Publication date :

    2020-04-28


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    H02N Elektrische Maschinen, soweit nicht anderweitig vorgesehen , ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR / B60L PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES , Antrieb von elektrisch angetriebenen Fahrzeugen / F04D Strömungsarbeitsmaschinen , NON-POSITIVE-DISPLACEMENT PUMPS / F16C SHAFTS , Wellen



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