A stocker is disposed above a processing device and includes: a plurality of shelves provided in multiple stages in an up-down direction, to place articles thereon; and a crane to place an article on the shelves or take out an article placed on the shelves. The shelves include: a carry-in/out port used for an overhead transport vehicle to place an article thereon; and storage shelves used for the crane to place an article thereon. The carry-in/out port has a vertical dimension that allows a grip of the overhead transport vehicle to place the article from above. More storage shelves are provided than the carry-in/out port and are provided to have a smaller vertical dimension than that of the carry-in/out port. The crane places an article on the carry-in/out port onto the storage shelves or place an article on the storage shelves onto the carry-in/out port by a transfer device.
Stocker system
2022-02-01
Patent
Electronic Resource
English
IPC: | H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B66C Krane , CRANES / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last |