A heater is provided having at least one thermally sprayed resistive heating layer, the resistive heating layer comprising a first metallic component that is electrically conductive and capable of reacting with a gas to form one or more carbide, oxide, nitride, and boride derivative; one or more oxide, nitride, carbide, and boride derivative of the first metallic component that is electrically insulating; and a third component capable of stabilizing the resistivity of the resistive heating layer. In some embodiments, the third component is capable of pinning the grain boundaries of the first metallic component deposited in the resistive heating layer and/or altering the structure of aluminum oxide grains deposited in the resistive heating layer.
THERMALLY SPRAYED RESISTIVE HEATERS AND USES THEREOF
2017-09-14
Patent
Electronic Resource
English
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