Provided are a fireproof door apparatus, a fireproof structure, and a substrate treating facility.The fireproof door apparatus includes a fireproof shutter opening and closing a passage connecting two spaces, a release unit installed on one side of the passage and in the fireproof shutter and fixing the fireproof shutter in an open state using magnetic force or releasing the fireproof shutter that is fixed, and a gas spring connected to the fireproof shutter and moving the fireproof shutter toward the passage by heat of the fire to close the passage.


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    Title :

    FIREPROOF DOOR APPARATUS, FIREPROOF STRUCTURE AND SUBSTRATE TREATING FACILITY


    Contributors:
    KIM MIN BEOM (author) / YOON EUN SANG (author) / CHUNG NAM HO (author) / BAEK DOO HYUN (author)

    Publication date :

    2024-11-28


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / E05F DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION , Vorrichtungen zum Bewegen der Flügel in die Offen- oder Schließstellung / A62C FIRE-FIGHTING , Feuerbekämpfung / B66B Aufzüge , ELEVATORS



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