An optical element includesa transparent substrate andan intermediate coating extending over at least one main surface of the substrate. The intermediate coating has a plurality of dense thin layers which alternate in having a first index refractive index and a second refractive index, the first refractive index being greater than the second refractive index.The optical element further includesat least one porous layer extending over the intermediate coating, opposite the substrate. The porous layer has a third refractive index that is lower than the first and second refractive indices.
ANTIREFLECTIVE OPTICAL ELEMENT
2024-12-26
Patent
Electronic Resource
English
Optical-gradient type of antireflective coatings for sub-70 nm optical lithography applications
British Library Conference Proceedings | 2003
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