This paper addresses an innovative optical scheme to detect ultrafine motions of micromechanical structures, as a generic design for a whole class of sensors including accelerometers, gyroscopes, position sensors, etc.. We fabricated a monolithically integrated micromechanic optic sensor (MIMOS) on a Si substrate. The device consists of two superimposing gratings with a small angle and an array of photodetectors.


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    Title :

    A generic monolithically integrated micromechanic optic sensor (MIMOS)


    Contributors:
    Tran, A.T.T.D. (author) / Lee, J.J. (author) / Zhang, K. (author) / Lo, Y.H. (author)


    Publication date :

    1996-01-01


    Size :

    272047 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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