Polysilicon surface-micromachining offers a new approach to the development of micro-optical systems on silicon. An "optical bench on a chip" with multiple three-dimensional components that are movable has been developed. An accelerometer, which relies on the measurement of optical intensity change due to the interaction between a light beam and a movable optical filter, has been fabricated. The filter consists of a aluminum-coated polysilicon grating that is connected to folded-beam springs that are anchored on the substrate. A 0.5 micron movement of the mass-spring system translated to 150 g acceleration. Simulation of the vibration modes of the mechanical structure indicate that the first natural frequency would occur at 6.9 kHz. A new accelerometer has been designed that can sense 10 g with a 1 micron movement of the filter. Optical interferometric sensors have also been fabricated. These can be also be used in high precision accelerometers. Multi-axis accelerometers can be easily developed in these silicon micro-optical systems.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Micro-optical inertial sensors using silicon MEMS


    Contributors:
    Tien, N.C. (author)


    Publication date :

    1998-01-01


    Size :

    993676 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Micro-Optical Inertial Sensors Using Silicon MEMS

    Tien, N. / IEEE; Aerospace and Electronics Systems Society | British Library Conference Proceedings | 1998


    Performance of MEMS inertial sensors

    Kourepenis, A. / Borenstein, J. / Connelly, J. et al. | IEEE | 1998


    Performance of MEMS inertial sensors

    Kourepenis, A. / Borenstein, J. / Connelly, J. et al. | AIAA | 1998


    Performance of MEMS Inertial Sensors

    Kourepenis, A. / Borenstein, J. / Connelly, J. et al. | British Library Conference Proceedings | 1998


    Performance of MEMS inertial sensors

    Kourepenis, A. / Borenstein, J. / Connelly, J. et al. | Tema Archive | 1998