We have proposed and implemented a new concept for fabricating high reflectance DBR grating channel waveguides in materials such as LiNbO/sub 3/ which bypasses many of the problems associated with previous techniques. First, annealed proton exchanged channel waveguides were fabricated on the surface of a LiNbO/sub 3/ substrate using a standard process. Next, we deposited 1800 A of silicon on the surface by e-beam evaporation. A first-order grating (with a period of 359 nm) was formed on the surface of the silicon with commercial photoresist and standard holography using an argon laser at /spl lambda/=457.9 nm. The grating was transferred to the silicon layer by RIE. No additional buffer layer was added. Our preliminary results show higher reflection than any other previously reported. The optimized process is expected to find applications in commercially viable devices. These include key devices of WDM systems such as tunable rare-earth doped DFB lasers, modulators, and tunable filters; as well as SHG devices.


    Access

    Check access

    Check availability in my library


    Export, share and cite



    Title :

    High reflectance DBR gratings in LiNbO/sub 3/ channel waveguides for WDM applications


    Author / Creator :

    Type of media :

    Conference paper


    Type of material :

    Electronic Resource



    High Reflectance DBR Gratings in LiNbO3 Channel Waveguides for WDM Applications

    IEEE / Lasers and Electro-Optics Society | British Library Conference Proceedings | 1995


    Nonvolatile Holographic Gratings in Doubly Doped LiNbO~3

    Liu, L. / Liu, D. / Ren, L. et al. | British Library Conference Proceedings | 2002


    Characterisation of LiNbO/sub 3/:Er/Yb Waveguides

    Cantelar, E. / Munoz, J.A. / Nevado, R. et al. | IEEE | 1998


    WB4 Second Harmonic Generation in Coupled LiNbO~3 Waveguides

    IEEE | British Library Conference Proceedings | 2002


    Second harmonic generation in coupled LiNbO/sub 3/ waveguides

    Amoroso, A. / Di Falco, A. / Leo, G. et al. | IEEE | 2002