A one-step micromachining process, which utilizes laser assisted chemical wet etching is applied for the fabrication of plano-convex micro-lens arrays in quartz, which are used as beam homogenizers for high power lasers.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Fabrication of micro-lenses in quartz


    Contributors:
    Lippert, T. (author) / Kopitkovas, G. (author) / David, C. (author) / Wokaun, A. (author) / Gobrecht, J. (author)


    Publication date :

    2005-01-01


    Size :

    211164 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Double-Slot Antennas on Extended Hemispherical and Elliptical Quartz Dielectric Lenses

    Filipovic, D. F. / Rebeiz, G. M. | British Library Online Contents | 1993


    GaN Micro-LED Arrays with Integrated Sapphire Micro-Lenses

    IEEE | British Library Conference Proceedings | 2003


    Fabrication Techniques for Very Fast Diffractive Lenses

    Tai, A. M. / Marron, J. C. / National Aeronautics and Space Administration | British Library Conference Proceedings | 1993


    LIGA fabrication of X-ray Nickel lenses

    Nazmov, V. / Reznikova, E. / Snigirev, A. et al. | British Library Online Contents | 2005


    Fabrication of parabolic nanofocusing x-ray lenses [5539-06]

    Kurapova, O. / Feste, S. / Gather, M. et al. | British Library Conference Proceedings | 2004