We propose a contactless characterization approach for evaluating semiconductor devices and integrated circuits that operate in the THz regime (0.1–3 THz). The non-contact probe consists of on-chip receiving and transmitting THz antennas in a co-planar waveguide environment. Commercially available frequency extension modules with horn antennas are used in conjunction with microwave vector network analyzers to excite the proposed non-contact probe. A hemispherical lens couples the signals into device under test using the on-chip antennas. We discuss the calibration process and present the numerical evaluation of two non-contact probe schemes.


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    Title :

    Non-contact THz probes for on-chip device and IC characterization


    Contributors:


    Publication date :

    2012-07-01


    Size :

    872294 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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