We investigate the experimental limitations of the maximum resolution that can be achieved in far-field subsurface thermal imaging with a numerical aperture increasing lens- High-resolution thermal imaging has applications in failure analysis of Si integrated circuits.
High resolution subsurface thermal imaging using a numerical aperture increasing lens
2005 Quantum Electronics and Laser Science Conference ; 1 ; 377-379 Vol. 1
2005-01-01
1716835 byte
Conference paper
Electronic Resource
English
ThN5 Comparison of Numerical Aperture Increasing Lens and Standard Subsurface Microscopy
British Library Conference Proceedings | 2001
|British Library Conference Proceedings | 2005
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