We investigate the experimental limitations of the maximum resolution that can be achieved in far-field subsurface thermal imaging with a numerical aperture increasing lens- High-resolution thermal imaging has applications in failure analysis of Si integrated circuits.


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    Title :

    High resolution subsurface thermal imaging using a numerical aperture increasing lens


    Contributors:


    Publication date :

    2005-01-01


    Size :

    1716835 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English