Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Laser micromachining of silicon in sulfur hexafluoride atmosphere: experiment and numerical simulation


    Contributors:
    Yashkir, Y.M. (author) / Seongkuk Lee, (author) / Harb, M. (author) / Yashkir, Y.Yu. (author)


    Publication date :

    2005-01-01


    Size :

    205881 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




    Laser Micromachining In A Reactive Atmosphere

    Shlichta, Paul J. / Zahaykevich, George | NTRS | 1988


    Sulfur hexafluoride gas cylinder transportation device

    DAI YAZHOU / YIN FENG / HOU PENG et al. | European Patent Office | 2020

    Free access