With MEMS technologies, instrument subcomponents are integrated in the design to form individual gyroscopes and accelerometers on a single chip. This replaces the assembly of individual subcomponents which forms conventional instruments. Similarly, MEMS instrument components can be integrated to form complete inertial measurement units (IMUs). Integration is the only practical approach to realizing low cost and small size units, largely because both instrument and IMU assembly and instrument alignment tasks are eliminated. The obstacle to success is the lack of fabrication process maturity which limits the yield of satisfactory devices which, in turn, very severely limits the yield and escalates the cost of systems that require six working devices on the same chip. The solution to this problem is to base the IMU on instruments with a common design so that the fabrication process variations produce similar effects on each of the instruments. The IMU performance can be optimized by exploiting the commonality between instruments.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    An integrated MEMS inertial measurement unit


    Contributors:


    Publication date :

    2002-01-01


    Size :

    578263 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Modeling and Analysis of Errors in MEMS Inertial Measurement Unit

    Ramalingam, R / Anitha, G / Shanmugam, J | AIAA | 2008


    Temperature-Dependent Optimized Calibration of a MEMS Inertial Measurement Unit

    Meirovich, Eden / Choukroun, Daniel | British Library Conference Proceedings | 2022


    Calibration-compensation method for micro inertial measurement unit based on MEMS

    Hongwei, S. / Jiancheng, F. / Wei, S. | British Library Online Contents | 2008


    Integrated MEMS Inertial/GPS navigation system

    Emerald Group Publishing | 2002


    Method for operating inertial measurement unit, inertial measurement unit and vehicle

    ROBERTS JOHN JAMES | European Patent Office | 2024

    Free access