Defect localization in modern ICs can be extremely challenging. To address this complexity several optically based methodologies have been developed over the past decade. These techniques will be described demonstrating their utility in locating defects.
Optical tools and techniques for failure analysis of modern integrated circuits
2003-01-01
172481 byte
Conference paper
Electronic Resource
English
Optical Tools and Techniques for Failure Analysis of Modern Integrated Circuits
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