Defect localization in modern ICs can be extremely challenging. To address this complexity several optically based methodologies have been developed over the past decade. These techniques will be described demonstrating their utility in locating defects.


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    Title :

    Optical tools and techniques for failure analysis of modern integrated circuits


    Contributors:
    Cole, E.I. (author) / Bruce, M.R. (author) / Barton, D.L. (author) / Tangyunyong, P. (author) / Bruce, V.J. (author) / Hawkins, C.F. (author) / Soden, J.M. (author) / Henderson, C.L. (author) / Ring, R.M. (author) / Chong, W.-L. (author)


    Publication date :

    2003-01-01


    Size :

    172481 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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