The following topics are dealt with: MEMS fundamentals; MEMS fabrication technology; MEMS market and industry structure; defense applications; investment assessment; inertial measurement devices; multiple device chips; optical MEMS components; monolithic free-space optical disk pickup head; digital micromirror display; optomechanical displays; environmental monitoring sensors; wireless integrated microsensors; tactical remote sensors; mass spectrograph; miniature analytical instrumentation; microdisk arrays for data storage; multi-user MEMS projects; electronic design aids; fluid flow analysis; and MEMS technology trends.


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    Title :

    Microelectromechanical systems (MEMS)


    Contributors:

    Published in:

    Publication date :

    1997-01-01


    Size :

    6010134 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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