Microelectromechanical systems (MEMS) combined with optical components add optical functionality to devices and lead to the terms optical MEMS or MOEMS. The underlying technology of the presented devices is silicon-on-insulator (SOI) based batch fabrication, which delivers small, reliable and lasting monolithic bulk silicon structures for commercial devices with the advantage of being very insensitive to temperature changes. The particular strength of the technology is monolithic horizontal and vertical micromirrors for a variety of applications.
Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics
The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society ; 2 ; 580-581 vol.2
2002-01-01
247189 byte
Conference paper
Electronic Resource
English
WBB3 Optical MEMs based on Silicon-on-Insulator (SOI) for Monolithic Microoptics
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