There are a number of different ways to achieve tunability. Among these, MEMS technology offers a new approach to mechanically adjust the lasing cavity length to select the output wavelength. In this work, we report on the fabrication of a tunable Fabry-Perot filter based on the consideration of process and material compatibility when this filter structure is to be fabricated directly onto the VCSEL wafers as a tunable laser.


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    Title :

    Study of micromachined tunable filter and its potential application to tunable laser


    Contributors:
    Chou, B.C.S. (author) / Lin, W.T. (author) / Chiou, J.C. (author)


    Publication date :

    2001-01-01


    Size :

    119507 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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