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    Title :

    AlGaAs Photonic Integrated Circuits Fabricated Using Chemically Assisted Ion Beam Etching


    Contributors:
    Grande, W.J. (author) / Johnson, J.E. (author) / Tang, C.L. (author)


    Publication date :

    1990-01-01


    Size :

    59839 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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