A schematic drawing of Si wire waveguide is shown. We aim at making the Si waveguide with a 300-nm-square section in order to remove the polarization dependence. The spot size converter consists of the tapered Si wire waveguide with a tip width of 60 nm and the 3x3 /spl mu/m-square polymer waveguide.


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    Title :

    Fabrication and evaluation of submicron-square Si wire waveguides with spot size converters


    Contributors:
    Tsuchizawa, T. (author) / Watanabe, T. (author) / Tamechika, E. (author) / Shoji, T. (author) / Yamada, K. (author) / Takahashi, J. (author) / Uchiyama, S. (author) / Itabashi, S. (author) / Morita, H. (author)


    Publication date :

    2002-01-01


    Size :

    162229 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English