We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency sputtering after annealing. Intense photoluminescence having a peak wavelength of around 430 nm was observed from a sample annealed at 600°C for 20 min. Tantalum oxide films that emit blue light can be useful as materials for novel active optical devices utilizing Ta2O5/SiO2 multilayered photonic crystals.
Fabrication of Blue-Light Emitting Tantalum Oxide Films by Radio-Frequency Sputtering
2008-12-01
272584 byte
Conference paper
Electronic Resource
English
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