We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency sputtering after annealing. Intense photoluminescence having a peak wavelength of around 430 nm was observed from a sample annealed at 600°C for 20 min. Tantalum oxide films that emit blue light can be useful as materials for novel active optical devices utilizing Ta2O5/SiO2 multilayered photonic crystals.


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    Title :

    Fabrication of Blue-Light Emitting Tantalum Oxide Films by Radio-Frequency Sputtering


    Contributors:
    Miura, K. (author) / Miyazaki, H. (author) / Hanaizumi, O. (author)


    Publication date :

    2008-12-01


    Size :

    272584 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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