Summary form only given. Metal semiconductor metal (MSM) photodetectors were fabricated from epitaxial material containing low temperature (LT) AlGaAs window (or cladding) layers and tested. Due to the high resistivity of the LT-AlGaAs, the epitaxial lift off (ELO)-NP MSM performs comparably to its on-wafer complement.
Low-temperature AlGaAs-GaAs epitaxial lift-off metal-semiconductor-metal photodetector
Proceedings of LEOS'94 ; 1 ; 50-51 vol.1
1994-01-01
179610 byte
Conference paper
Electronic Resource
English
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