The inductively coupled plasma enhanced quantum well intermixing (ICP-QWI) technology has been well established for tuning the bandgap of quantum well structure using argon plasma. This technology provides effective bandgap tuning capability (e.g., with quantum well bandgap shift as large as 104 nm in quantum well laser structure in InP substrate [1]), which is competent for implementing photonic integration. A differential bandgap shift of 86 nm with very small differential linewidth broadening of /spl sim/3 /spl Aring/ was obtained by applying selective intermixing using SiO/sub 2/ mask layer. Photonics integration capability was demonstrated by the fabrication of the broad area extended cavity lasers and the fabricated passive waveguide has a measured loss of 2.98 cm/sup -1/.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Low-loss waveguide fabrication using inductively coupled argon plasma enhanced quantum well intermixing in InP quantum well sample


    Contributors:
    Mei, T. (author) / Djie, H.S. (author) / Sookdhis, C. (author) / Arokiaraj, J. (author)


    Publication date :

    2002-01-01


    Size :

    250065 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Low-Loss Waveguide Fabrication using Inductively Coupled Argon Plasma Enhanced Quantum Well Intermixing in InP Quantum Well Sample

    Mei, T. / Djie, H. S. / Sookdhis, C. et al. | British Library Conference Proceedings | 2002




    Quantum well intermixing by proton irradiation

    Tan, H.H. / Jagadish, C. / Gal, M. | IEEE | 1995


    Quantum Well Intermixing by Proton Irradiation

    IEEE / Lasers and Electro-Optics Society | British Library Conference Proceedings | 1995