We built and tested a low-cost 8-by-8 millimeter-wave focal plane array using antenna-coupled micro-bolometers. The array consists of slot antennas coupled to nickel bolometers and was fabricated using optical lithography on high-resistivity silicon wafers. The measured noise equivalent temperature difference (NETD) of an individual element was 450 K. Simulation results corresponded with observed device performance. An improved design was then implemented using a square spiral antenna. We discuss the fabrication of this type of array element, including some modeling results, and present the methods and results of our measurements.


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    Title :

    Passive millimeter-wave focal plane array


    Contributors:
    Middleton, C. (author) / Zummo, G. (author) / Weeks, A. (author) / Pergande, A. (author) / Mirth, L. (author) / Boreman, G. (author)


    Publication date :

    2004-01-01


    Size :

    150613 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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