We present some tuning characteristics of a GaAlAs/GaAs micromachined tunable filter with a thermal strain control layer and heating element integrated on a top surface. We present the design of micromachined filters for a wide tuning range and for fast wavelength tuning. Experimentally, we demonstrate the fast tuning response with rise time and fall time of below 100 /spl mu/s.


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    Title :

    Dynamic response of thermally tunable micromachined optical filter with low tuning voltage


    Contributors:
    Amano, T. (author) / Hino, T. (author) / Koyama, F. (author) / Arai, A. (author) / Matsutani, A. (author)


    Publication date :

    2002-01-01


    Size :

    237613 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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