Using water to reduce the redeposition of ablation debris, high precision holes, with diameter of 4 /spl mu/m and depth over 200 /spl mu/m, were drilled from the rear surface of silica glass with infrared femtosecond laser pulses. The long holes with very small diameters had a well-defined wall without obvious taper.
Hole drilling of silica glass with infrared femtosecond laser pulses
2001-01-01
194929 byte
Conference paper
Electronic Resource
English
Hole Drilling of Silica Glass with Infrared Femtosecond Laser Pulses
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