A grazing incidence one-dimensional focusing collector for use in the extreme ultraviolet is described. The collector has a field of view of 1 x 50 deg, a focal length of 3015 cm, and a total unobstructed area of 224 sq cm. The instrument employs an interchangeable detector package of either channel-electron multipliers or proportional counters which yield a limiting sensitivity of 1.0 photons/sq cm sec A at 170 A and 0.05 photons/sq cm sec A at 90 A, respectively, for one second integrations. The design and calibration of the instrument are described in detail. Data obtained by this instrument during recent rocket flights are presented.
Large area extreme ultraviolet focusing collector
1975-04-01
Miscellaneous
No indication
English
Extreme ultraviolet lithography
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