Silicon tetrachloride spray feeder mechanism is incorporated into high-temperature reactor for production of highly pure silicon intended for solar cells. Feeder supplies silicon tetrachloride as liquid droplets that rapidly vaporize in high temperature (2,000 to 2,200 K) reactor zone.
Silicon tetrachloride spray feeder
NASA Tech Briefs ; 4 , 1
1979-08-01
Miscellaneous
No indication
English
Low-Contamination Vibrating Feeder for Silicon Chips
NTRS | 1984
|Catalytic conversion of silicon tetrachloride to trichlorosilane for a poly-Si process
Online Contents | 2012
|