Feasibility study looks at effectiveness of silicon nitride passivation coating against moisture and mobile ions. Coating was tested on CMOS microcircuits. Tests included temperature cycling, high-temperature electrical stress, and temperature and humidity exposure. Report concludes plastic-encapsulated circuits with protective coating exhibit high survival rates; it includes tables summarizing test results and figures that show effects of flexing.


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    Title :

    Silicon nitride passivation of IC's


    Contributors:

    Published in:

    Publication date :

    1980-09-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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