Feasibility study looks at effectiveness of silicon nitride passivation coating against moisture and mobile ions. Coating was tested on CMOS microcircuits. Tests included temperature cycling, high-temperature electrical stress, and temperature and humidity exposure. Report concludes plastic-encapsulated circuits with protective coating exhibit high survival rates; it includes tables summarizing test results and figures that show effects of flexing.
Silicon nitride passivation of IC's
NASA Tech Briefs ; 5 , 2
1980-09-01
Miscellaneous
No indication
English
GaAs Mqw Modulators On Silicon IC's
IEEE | 1994
|Passivation of silicon by silicon nitride films
Online Contents | 2002
|British Library Online Contents | 1992
NTRS | 1983
|Automated ion implantation for IC's
NTRS | 1980
|