New process demonstrated to make thin films (usually thousands of angstroms to few microns thick) that have properties of diamonds. Various plasma and ion-beam techniques employed to generate films. Films made by radio-frequency plasma decomposition of hydrocarbon gas or other alkanes, by low-energy carbon-ion-beam deposition, or by ion plating and dual ion technique using carbon target. Advantages of new process over others are films produced, though amorphous, are clear, extremely hard, chemically inert, of high resistivity, and have index of refraction of 3.2 properties similar to those of single-crystal diamonds. Films have possible uses in microelectronic applications, high-energy-laser and plastic windows, corrosion protection for metals, and other applications where desired properties of film shaped during the film-formation process.


    Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    Depositing Diamondlike Carbon Films


    Contributors:

    Published in:

    Publication date :

    1986-05-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English






    Making Diamondlike Films More Transparent

    Mirtich, Michael J. / Kussmaul, Michael T. / Sovey, James S. et al. | NTRS | 1994